Technology Research Award
2021/11/09
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Project |
Development and Mass Production Technology of 248nm Photoresist for 12-inch Process Line |
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Company |
KEMPUR |
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Project |
Development and Mass Production Technology of 248nm [hotoresist for 12-inch Process Line |
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Company |
SINOPHORUS |
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Project |
Hard Mask Copper Damascus Process Etching Residue Remover |
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Company |
Anji |
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Project |
R&D and Industrialization of Ultra-high Purity Hydrogen Chloride for IC |
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Company |
PERIC |
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